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Lists parameters for film setup, including density, Z-Factor, soak, ramp, and control loop settings.
Describes the key areas of the front panel, including fixed keys, software keys, and displays.
Explains the different areas of the RunTime screen: data values, current phase, and graphical data area.
Explains how deposition processes are controlled by film parameters and process sequencing lists.
Details the procedure for reviewing and editing film parameters, including accessing and changing values.
Describes how to create, edit, and manage deposition processes, including layers, modes, films, and thickness.
Details how to use the manual power mode and hand controller for adjusting source power.
Outlines parameters for system configuration, including LCD contrast, password lock, and run number.
Explains how to adjust the LCD contrast and bias for optimal viewing.
Describes the password lock for restricting parameter changes in executive menus.
Details password lock for I/O programs and communication parameters.
Guides the user through activating the Test Mode for simulating sensor input and running processes.
Explains the connection of the high current power supply to the Model 880's control voltage output.
Describes the output connections providing rate control voltage for deposition sources.
Describes the configuration options for opto-isolated input cards using jumpers.
Lists the factory-preprogrammed functions for the eight output relays of the Model 880.
Details the process of saving and recalling I/O programs to an alternative memory sector.
Outlines parameters for communications setup: Lock Code, Keyboard Beep, Baud Rate, and Protocol.
Discusses calibration of thickness reading affected by material density, Z-Factor, and tooling.
Outlines a procedure for determining material density for accurate film thickness calculation.
Explains how to calculate the Z-Factor, relating film acoustic properties to the sensor crystal.
Lists common system problems, their causes, and remedies that users can perform.
General| Brand | Telemark |
|---|---|
| Model | 880 |
| Category | Controller |
| Language | English |
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