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Telemark 880
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Model 880 DEPOSITION CONTROLLER
y
SECTION 0.XX
e page 1 of 275 ^
TFC-2002 JM
USERS MANUAL 518-030
Rev <preliminary> June 7, 2003
.current:
Telemark
Model 880 Deposition Controller
>
MANUAL
CONTROL
RATE-A/SEC POWER-% THICKNESS-KA
START
STOP
MANUAL ZERO
MODEL 880
DEPOSITION CONTROLLER
MENU
STATUS
>
WARNING
!
The power cord protective
grounding conductor must be
connected to ground. No user
serviceable parts inside. Refer
servicing to qualified personnel.
FUSE: 2 x 2.00 AMP
QUICK-ACTING (F) 250v
90-264 vac, 50-60 Hz, 230VA MAX
INPUTS / OUTPUTS
SOURCE
SENSORS
I/O 4 1/O 3 I/O 2 I/O 1
COMM OPTION
RS232
MEM
7 5 3 1
8 6 4 2
7 5 3 1
8 6 4 2
.overview w/ generalizations only
intro to user interface, overview from general to specific
=
overview w/ generalizations and intro to specifics as generalizations are developed.
<
Telemark reserves the right to change any information contained in this manual without notice
©
Copyright Sycon Instruments, Inc. & Telemark 2003
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