Telemark 880 - Detailed Film Parameter Descriptions

p Model 880 DEPOSITION CONTROLLER y
SECTION 3.XX
e page 71 of 275 ^
Detailed Film Parameter Descriptions
____________________________________________________________________
Parameter DENSITY
DENSITY VALUE RANGE IS 0.40 - 99.99
Units gm/CC
Material Density
The Density parameter refers to the measured material in gm/CC. This constant is normally the
bulk material value but is sometimes different due to deposition and film growth conditions. This value is
utilized in the thickness equation to convert measured mass to a thickness value. See Table x4.1 in Section
x4.3 for an extensive value list. See Section x4.2 for calibration information.
____________________________________________________________________
Parameter Z FACTOR
Z FACTOR VALUE RANGE IS 0.100 - 9.999
Units None
Material Z-Factor
The Z-Factor parameter refers to the elastic properties of the measured material. This value is
utilized in the thickness equation to match the acoustical properties of the film being measured to the
acoustic properties of the base quartz material of the sensor crystal. This correction is necessary to insure
accurate measurements when sensor crystal shifts of greater than 10% are realized. See Table 4.1 for an
extensive material value list. See Section 4.2 for calibration information.
____________________________________________________________________
Parameter SETPOINT THK LIM
THICKNESS VALUE RANGE IS 0 - 999.999 KA
Units Kilo Angstroms
Setpoint Thickness Limit
The SETPOINT THICKNESS parameter is used to provide a comparison point for the Model 880
Thickness Setpoint Event. This event will be triggered whenever the thickness display equals or exceeds
the setpoint value. The final or end thickness of a layer is layer dependent and is determined by the value
programmed in the process, it should not be confused with this parameter which is film associated.
____________________________________________________________________
Parameter Final Thickness Limit (Trigger) non-sequencing only
THICKNESS VALUE RANGE IS 0.000 to 999.999 KÅ
Units Kilo Angstroms
Final Thickness Limit
The FINAL THICKNESS LIMIT parameter is only present in the non-sequencing mode. It is used
to provide an end thickness value whose counterpart in the sequencing mode is the thickness value in a
process program. This value determines the end of the deposit for the active film.
____________________________________________________________________
Parameter SETPOINT TIME LIM
ELAPSED TIME RANGE IS 0:00 - 99:59
Units Min:Sec
Setpoint Time Limit
The SETPOINT TIME LIMIT parameter is used to provide a comparison point for the Model 880
Timer Setpoint Event status. The timer relay status is set when this time is exceeded.
____________________________________________________________________
Parameter SOAK 1 PWR VALUE
Percentage Value: Range is 0.0 - 100.0
Units Percent
Soak 1 Power Value
This parameter sets the deposition source power value to be used as the first level of soak power in
the pre-deposition cycle. This power level will be maintained for the duration of the soak 1 timer. This