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Model 880 DEPOSITION CONTROLLER
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SECTION 6.XX
e page 221 of 276 ^
Read RunTime Data Command Examples
Command E3 or E 3
Response A-1
Description Read Deposition Thickness In Angstroms. Thickness is Minus 1 Angstrom.
Command E4
Response A93
Description Read Phase Timer. Timer is 93 Seconds, Or 1 Minute, 33 Seconds.
Table 6.11: Group 4 Examples.
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Read, Set Status Information Group 5--
Commands F & G
(F) Read Status Information. These commands will read certain status data from the Model 880. This
includes information such as whether the unit is stopped, what film is active, is the unit at max. power, etc.
This information is in a more condensed form then available through the I/O system. The command is the
letter F followed by a parameter number.
(G) Set Status Information. This forces certain status to occur in the Model 880. The group command
is the letter G followed by {1|2|3|17|21|22|23|24} = {0|1|2|3}. Note: 2,3 only allowed on G3 = form. There
are only 8 parameter options in this group.
Command: F
Mnemonic: EXCT_rstat (read status)
Parameters: [1..66] corresponding to system status types SKHLD..LAUNCHFNO
Description: Requests a read back of status information regarding the current operating
status of the instrument.
Returns:
[RZCD_AOK][status_value] if proper type # (1..66) id was sent. Exact value of
[status_value] depends on the particular parameter for which the data was requested.
[RZCD_ILDV] if improper value for parameter arguments.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc.
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Command: G
Mnemonic: EXCT_wstat (write status)
Parameters: [1,2,3,17,21,22,23,40,66] [assign_delim] [status_value] with 1,2,3,...40,60
corresponding to system status types SKHLD..MCTL, FLMHLD, JAMZPR,
ATRATE, ZERO, IO_SCALAR_ANALOG and LAUNCHFNO. The status_value is
the new intended status value for the status parameter to take on.
Description: Command allowing certain internal status conditions (SKHLD, FORSPL, MCTL,
FLMHLD, JAMZPR, ATRATE, ZERO, XTST, IO_SCALAR_ANALOG and
LAUNCHFNO) to be set to specific status values via the communications interface. See the F
command for status read for valid range of [status_value] argument for a given value of the
status variable selection index (SKHLD, FORSPL, MCTL, FLMHLD, JAMZPR, ATRATE,
ZERO, IO_SCALAR_ANALOG, LAUNCHFNO ).
Returns:
Read
Set Status Information
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