p
Model 880 DEPOSITION CONTROLLER
y
SECTION 6.XX
e page 224 of 276 ^
0 RNMD_FALSE
1 RNMD_TRUE
______________________________________________________________________
Parameter 8 Substrate Shutter Status
Value Range 0,1
Units Closed, Open
This parameter indicates if the substrate shutter is open or closed. A returned value of 0 indicates that the
shutter is closed and a value of 1 indicates that it is open. This is a read only parameter.
access: SRCSHUT bitmap true(1) when source shutter open, false(0) if closed. One per active source ident
(1..8) LSB to MSB. In non-codeposition systems, only one shutter can be open at any one time.
0 ALL SOURCE SHUTTERS CLOSED
1 Source # 1 SRCSHUT OPEN
2 Source # 2 SRCSHUT OPEN
4 Source # 3 SRCSHUT OPEN
8 Source # 4 SRCSHUT OPEN
16 Source # 5 SRCSHUT OPEN
32 Source # 6 SRCSHUT OPEN
64 Source # 7 SRCSHUT OPEN
128 Source # 8 SRCSHUT OPEN
255 ALL SOURCE SHUTTERS OPENED
______________________________________________________________________
Parameter 9 Phase Status
Value Range 0 To 17
Units None
This parameter indicates the phase that the Model 880 is in according to the following Table:
0 Power Up 1 Stopped
2 Crystal Verify 3 Rise 1
4 Soak 1 5 Rise 2
6 Soak 2 7 Soak Hold
8 Shutter Delay 9 Deposit
10 Rate Ramp 11 Deposit After Rate Ramp
12 Time Power Recovery 13 Rise 3
14 Idle 15 Idle After Time Power
16 Manual 17 Ready
Table 6.12: Phase Status.
This is a read only parameter.
access: SQPHS sequencer phase, holds one of PCD_class (process code) data.
0 PCD_pup Power Up.
1 PCD_szp Stopped/Zero power.
2 PCD_bxvfy Crystal Verify.
3 PCD_ris1 Rise 1.
4 PCD_sok1 Soak 1.
5 PCD_ris2 Rise 2.
6 PCD_sok2 Soak 2.
7 PCD_skhl Soak Hold.
8 PCD_sdly Shutter Delay.
9 PCD_dpos Deposit.
10 PCD_rtrp Rate Ramp.
11 PCD_dpo2 Deposit phase after a rate ramp
12 PCD_tpwr Time power recovery phase
13 PCD_ris3 Idle ramp.
14 PCD_idlpr Idle power after successful deposit.
15 PCD_idltp Idle after ending deposit with a time/power phase.
16 PCD_manl Manual phase
17 PCD_rdy Ready phase
To Next Page
Loading...