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Model 880 DEPOSITION CONTROLLER
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SECTION 7.XX
e page 263 of 276 ^
Tooling Determination
Place a substrate in the normal holder location and deposit a film of approximately 5000
Angstroms using either bulk or calibrated density and Z-Factor values. Make sure that when doing this
calibration the tooling is set to 100%. Measure the substrate film thickness as in the density calibration
method and determine the correct Tooling Factor value by the following formula:
Substrate
Source
Sensor
TOOLING > 100%
TOOLING < 100%
Sensor
Substrate
Source
Figure- 7.1: Typical Tooling factors
Tooling % = 100
(Substrate Thickness)
(Displayed Thickness)
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