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Model 880 DEPOSITION CONTROLLER
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SECTION 11.XX
e page 274 of 276 ^
[copy this page to record film parameters]
Film Parameters for Film #________ in Process #________: date___-___-___
(Material) Density 0.40 to 99.99 gm/cc
(Material) Z-Factor 0.100 to 9.999
Setpoint Thickness Limit 0.000 to 999.999 KÅ
Final Thickness Limit (Trigger) 0.000 to 999.999 KÅ (non-sequencing only)
Setpoint Time Limit 0:00 to 99:59 MM:SS
Soak 1 Power level Value 0.0 to 100.0%
Power Ramp 1 Time (to pwr level) 0 to 99:59 MM:SS
Power Soak 1 Time (@ pwr level) 0 to 99:59 MM:SS
Soak 2 Power level Value 0.0 to 100.0%
Power Ramp 2 Time (to pwr level) 0 to 99:59 MM:SS
Power Soak 2 Time (@ pwr level) 0 to 99:59 MM:SS
Soak 3 Power level Value 0.0 to 100.0%
Power Ramp 3 Time (to pwr level) 0 to 99:59 MM:SS
Deposit Rate (requested) 0.0 to 999.9 A/S
Rate Ramp Mode OFF / ON
New Deposit Rate (Value) 0.0 to 999.9 A/S
Rate Ramp Time (Duration) 0:00 to 99:59 MM:SS
Rate Ramp (Thickn) Trigger Point 0 to 999.999 KÅ
Control Loop –Proportional term- 1 to 9999
Control Loop –Integral term- 0.0 to 99.9 sec
Control Loop –Derivative term- 0.0 to 99.9 sec
Max Power Limit 0.0 to 100.0%
Abort Max Power SW OFF/ON
Max Power Dwell 0:01-99:59 MM:SS
Shutter Delay Mode OFF, ON
Shutter Delay TIMEOUT 0:01-99:59 MM:SS
Shutter Delay QUALITY 1-50%
(XTAL) RATE SAMPLING OFF,TIMED,INTELL.
(XTAL) SAMPLE INTERVAL 0:01-99:59 MM:SS
(XTAL) SAMPLE DWELL TIME 0:01-99:59 MM:SS
(XTAL) SAMPLE QUAL 1-50%
(XTAL) SAMPLE ALARM TIME 0:01-99:59 MM:SS
FILM Fail Mode TIME POWER, ABORT IF FAIL
Control Loop Qual Limits 0 to 9
XTAL Stability S (Limits) 0 to 9
XTAL Life Bounds 0.0-100.0%
Plot Vert Scale Volts 1, 5, 10, 50, 100
Plot Horiz Scale H 1 to 600 samples
Data Plot Type Rate /Power /Rate Deviation
Source Sensor MAP SELECT 1 – 30
POCKET SELECT 0 – 63 Pockets
ETCHING MODE OFF/ON
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