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Model 880 DEPOSITION CONTROLLER
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SECTION 2.XX
e page 39 of 275 ^
The Power Related RunTime Screen parameter Dependency List is:
(Crystal Quality Indicator Select) L/Q, Loop x, Qual xx Film Parameters
(Manual mode) Running Process + Pressing fixed front panel MANUAL key +
attached Pendent (or on 1
st
STATUS screen: , , zero CH x)
(process start) .PerformCarry out the following 2 key sequence up to 3 times.
Press the fixed front panel START key + 1 of 4 touch panel keys:
Break Wait, Next Layer, Restart Layer, Reset / Start Process
(see figure in end of section 2.7). Use the appropriate touch key for the
task at hand. If unsure, use Reset / Start Process key in all 3 sequences.
Please read and understand this manual before starting a live process.
.options
material selection (4-2 to 4-6).
substrate selection (4-2)
tooling factor (ch 4, 4-3)
<< fig. 10-9, equip list 10-10 >>
<< sensor inst. 11-3 >>
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