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Model 880 DEPOSITION CONTROLLER
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SECTION 1.XX
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Power Related Menu Parameters ....................................................................................................................... 37
Power Related Menu Parameter Dependencies ................................................................................................. 38
Initial Programming Setups (menu parameters) .................................................................................. 40
Menu Parameter Values & Programming After Memory Purge........................................................................ 40
Menu Parameter Values & Programming After Factory Restored Memory ...................................................... 41
I/O Programming Introduction ............................................................................................................ 42
Boolean Logic Discussion ................................................................................................................................. 43
Simple I/O Program Examples .......................................................................................................................... 44
How To Develop I/O Programs............................................................................................................ 48
MENU PROGRAMMING AND OPERATION DETAILS [3.XX] ...................................................... 49
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3.0 .............................................................................................................................................. 49
LCD Touch Panel Overlay ................................................................................................................... 49
Front Panel Definitions........................................................................................................................ 50
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3.1 .............................................................................................................................................. 56
Navigating Through Model 880 Menus................................................................................................ 56
Menu Tree............................................................................................................................................. 57
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3.2 .............................................................................................................................................. 58
RunTime Screen Description................................................................................................................ 58
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3.3 .............................................................................................................................................. 60
Main Menu Description........................................................................................................................ 60
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3.4 .............................................................................................................................................. 63
Films And Processes............................................................................................................................. 63
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3.5 .............................................................................................................................................. 63
Film Edit/Review Mode ........................................................................................................................ 63
Film Parameter Checksum................................................................................................................................. 67
Film Parameter Lock Code................................................................................................................................ 67
Film Parameter: Source Sensor Map Select....................................................................................................... 68
Review SS MAP................................................................................................................................................ 68
Selecting the Active Film in Non-Sequencing Mode......................................................................................... 69
Detailed Film Parameter Descriptions ................................................................................................ 71
Detailed Map Parameter Descriptions................................................................................................. 79
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3.6 ............................................................................................................................................. 83
Editing Processes................................................................................................................................. 83
Process Lock Code ............................................................................................................................................ 93
Factory Restoration vs. Purged Settings ............................................................................................................ 93
Changing Memory Settings ............................................................................................................................... 93
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3.7 .............................................................................................................................................. 93
Set Active Process................................................................................................................................. 93
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3.8 .............................................................................................................................................. 94
Non-Sequencing Differences ................................................................................................................ 94
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3.9 .............................................................................................................................................. 96
Software Controlled RunTime Screen Keys.......................................................................................... 96
L/Q key (Crystal Quality).................................................................................................................................. 96
SMPL key (Sample and Hold)........................................................................................................................... 96
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3.10 ............................................................................................................................................ 97
Manual Power Control......................................................................................................................... 97
Using Pendent.................................................................................................................................................... 97
Using LCD keys ................................................................................................................................................ 98
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3.11 ............................................................................................................................................ 99
Model 880 Shutter Delay...................................................................................................................... 99
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3.12 ............................................................................................................................................ 99
Deposition Source Control Loop Description ...................................................................................... 99
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3.13 .......................................................................................................................................... 101
Film Phases And Parameter Groups.................................................................................................. 101
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3.14 .......................................................................................................................................... 102
System Configuration ......................................................................................................................... 102
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3.15 .......................................................................................................................................... 103