Telemark 880 - Page 74

p Model 880 DEPOSITION CONTROLLER y
SECTION 3.XX
e page 73 of 275 ^
This parameter sets the duration of the power ramp from the power level at the time that final
thickness was reached until the power reaches the value set by the soak 3 power value parameter.
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Parameter DEPOSIT RATE
Rate Value; Range is 0.0 - 999.9
Units Å/s (10
-8
cm/s)
Deposition Rate
This parameter determines the material deposition rate that the closed loop control system will try
to establish and maintain at the time that closed loop operation begins.
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Parameter RATE RAMP MODE
On/Off
Units None
Enabling Rate Ramp Mode
This parameter is an enable/disable switch for the rate ramp function and associated film
parameters. When set to Off the programming cursor window will skip over the associated parameters.
When set to On all associated parameters are accessible and it will be possible to alter the deposition
control rate profile during closed loop control. [The following 3 parameters are dependent upon this
parameter.]
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Parameter NEW DEP RATE
Rate Value; Range is 0.0 - 999.9
Units Å/s
New Deposition Rate
This parameter sets the new deposition rate value that is to be reached at the end of the rate ramp
operation.
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Parameter RATE RAMP TIME
Elapsed Time; Range is 0:00 - 99:59
Units Min:Sec
Rate Ramp Time
This parameter sets the duration of the rate ramp. The rate ramp starts at the rate control value at
the time that the rate ramp trigger is reached and ends at the value set by the new deposition rate parameter.
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Parameter RATE RAMP TRGR
Thickness Value; Range is 0 - 999.999
Units Kilo Angstroms
Rate Ramp Trigger Point Thickness
This parameter sets the trigger point for a rate ramp to begin during the deposit phase.
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Parameter CTL LOOP -P-
Ctrl Loop Gain; Range is 1 - 9999
Units None
Control Loop Gain Term
This parameter sets the closed loop rate control proportional gain.
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Parameter CTL LOOP -I-
Control Loop Time Constant; 0.0 - 99.9
Units Seconds
Control Loop Integral Term
This parameter sets the closed loop rate control integral term time constant.
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Parameter CTL LOOP -D-
Control Loop Time Constant; 0.0 - 99.9
Units Seconds
Control Loop Differential Term