3-2 <3. Name of Each Part/Starting and Shutting Down the Equipment >
IM 80J01A01-01E
(7) Sub Cover
Sub cover is opened when pouring distilled water into bath. Also,
sub cover is opened when service maintenance.
(8) Illumination Setting Part
In case of transmission Illumination option, illumination unit is set
on this part.
(9) Fiber Port
Port to connect the fiber to CQ1 Main Unit
(10) USB Connector
Connector for USB cable connection with the Workstation cable
(11) Gas Inlet Port
Port to connect the tube from Gas Mixer (option)
(12) Camera Cable Port
Inlet port to insert camera link cable to CQ1
(13) Power Cable Connector
Port to connect the power cable from Utility Box
(14) Gas Outlet Port
Port to exhaust the gas from chamber on XY stage when using
Gas Mixer
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