3-10 <3. Name of Each Part/Starting and Shutting Down the Equipment >
IM 80J01A01-01E
3.2.2 Shutting Down CQ1
(1) Select [File] menu [Exit] menu, or click the close box on the
main screen of CQ1 Software window.
(2) Click [OK] button.
In case that measurement is running, following message is shown.
Confirm that there are no problem to quit measurement then click
[OK].