Burkert 8626 - English; Default Chapter; Table of Contents

MFC/MFM - 3
english
GENERAL NOTES ...................................................................................................................................... 5
Symbols......................................................................................................................................................... 5
Safety notes ................................................................................................................................................ 5
Protection from damage by electrostatic charging................................................................ 6
Scope of delivery...................................................................................................................................... 6
Warranty conditions ................................................................................................................................ 6
SYSTEM DESCRIPTION ......................................................................................................................... 7
Type systematics..................................................................................................................................... 7
General function ....................................................................................................................................... 8
Sensors ......................................................................................................................................................... 9
Thermal measurement principle ................................................................................................. 9
Inline sensor (Types 8626 / 8006 / 8716 / 8706) ............................................................ 10
Bypass sensor in conventional technology "capillary"
(Types 8710 / 8700) ...................................................................................................................... 11
Bypass sensor in CMOSens® technology
(Types 8713 / 8703 / 8712 / 8702 / 8711 / 8701) ............................................................ 12
Control electronics ................................................................................................................................ 13
Proportional valve .................................................................................................................................. 14
TECHNICAL DATA ................................................................................................................................... 17
Type 8626 / 8006 MASS FLOW INLINE ................................................................................... 18
Type 8710 / 8700 MASS FLOW CMOSens® ........................................................................ 19
Type 8711 / 8701 MASS FLOW CMOSens® ........................................................................ 20
Type 8712 / 8702 MASS FLOW CMOSens® ........................................................................ 21
Type 8713 / 8703 MASS FLOW CMOSens® ........................................................................ 22
Type 8716 / 8706 MASS FLOW INLINE ................................................................................... 23
MassFlowController (MFC)
Types 8626 / 8710 / 8711 / 8712 / 8713 / 8716
MassFlowMeter (MFM)
Types 8006 / 8700 / 8701 / 8702 / 8703 / 8706