MFC/MFM - 51
deutsch
MassFlowController (MFC)
Typen 8626 / 8710 / 8711 / 8712 / 8713 / 8716
MassFlowMeter (MFM)
Typen 8006 / 8700 / 8701 / 8702 / 8703 / 8706
ALLGEMEINE HINWEISE
.....................................................................................................................
53
Darstellungsmittel................................................................................................................................... 53
Bestimmungsgemäße Verwendung ............................................................................................. 53
Sicherheitshinweise .............................................................................................................................. 53
Schutz gegen Beschädigung durch elektrostatische Aufladung ................................. 54
Lieferumfang ............................................................................................................................................. 54
Garantiebestimmungen ...................................................................................................................... 54
SYSTEMBESCHREIBUNG
..................................................................................................................
55
Typensystematik .................................................................................................................................... 55
Allgemeine Funktion .............................................................................................................................. 56
Sensor .......................................................................................................................................................... 57
Thermisches Messprinzip ........................................................................................................... 57
Inline-Sensor (Typen 8626 / 8006 / 8716 / 8706) ............................................................ 58
Bypass-Sensor konventioneller Technologie "capillary"
(Typen 8710 / 8700) ........................................................................................................................ 59
Bypass-Sensor in CMOSens®-Technologie
(Typen 8713 / 8703 / 8712 / 8702 / 8711 / 8701) ............................................................ 60
Regelelektronik ........................................................................................................................................ 61
Proportionalventil .................................................................................................................................... 62
TECHNISCHE DATEN
............................................................................................................................
65
Typ 8626 / 8006 MASS FLOW INLINE ...................................................................................... 66
Typ 8710 / 8700 MASS FLOW ..................................................................................................... 67
Typ 8711 / 8701 MASS FLOW CMOSens® ........................................................................... 68
Typ 8712 / 8702 MASS FLOW CMOSens® ........................................................................... 69
Typ 8713 / 8703 MASS FLOW CMOSens® ........................................................................... 70
Typ 8716 / 8706 MASS FLOW INLINE .................................................................................... 71