Burkert 8626 - System Description; Type Systematics

MFC/MFM - 7
english
These Operating Instructions contain information for the following Mass Flow
Controllers (MFC) and Mass Flow Meters (MFM) from the Bürkert product range:
1)
Please observe in this connection the note on the device types 8626 / 8006 in the section Connection
Configuration Type 8626/8006.
2)
CMOSens
®
is a registered trademark of Sensirion AG (Switzerland)
Type systematics
SYSTEM DESCRIPTION
Type
no.
Type End value range
Q
nom
(l
N
/min)
referred to air
/ N
2
Sensor Remarks
8626 MFC 25 ... 1500 Inline for devices from
Jan. 2003
1)
8006 MFM 25 ... 1500 Inline for devices from
Jan. 2003
1)
8716 MFC 25 ... 500 Inline
8706 MFM 25 ... 1500 Inline
8713 MFC 0.02 ... 50 Bypass / CMOSens
®2)
8703 MFM 0.02 ... 50 Bypass / CMOSens
®
8712 MFC 0.02 ... 50 Bypass / CMOSens
®
8702 MFM 0.02 ... 50 Bypass / CMOSens
®
8711 MFC 0.02 ... 50 Bypass / CMOSens
®
8701 MFM 0.02 ... 50 Bypass / CMOSens
®
8710 MFC 0.005 ... 1 Bypass / Capillary
8700 MFM 0.005 ... 1 Bypass / Capillary