Scanning Electron Microscope EM-30PLUS Operating Manual
125
11) Find out the position where image gets brightest by dragging X, Y axis in Gun
Alignment box of NS or adjusting mouse wheel.
Center: If you press [X, Y] button, X, Y axis moves to the right center.
(As the position of center does not necessarily mean the optimum state of e-gun, carry
out Fine Adjustment again after moving it to the center.)
After e-gun alignment of hardware, be sure to carry out gun alignment in NS.
When using with Gun align biased excessively, it can be hard on equipment.
12) Find out the location of e-gun and then start Filament optimization operation.
(See [4.2.2 Filament Optimization].)
(Before Filament Optimization)
(After Filament Optimization)
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