Scanning Electron Microscope EM-30PLUS Operating Manual
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13) Once e-gun alignment is completed, change Spot size in several stages and confirm if
brightness of screen gets brighter in proportion to Spot Size.
As Spot size gets bigger, screen gets bright and vice versa. If the brightness of electron
beam according to Spot size appears different, carry out e-gun alignment again.
In same condition, comparison before and after e-gun Align
Screen before e-gun Align