Scanning Electron Microscope EM-30PLUS Operating Manual
29
BSE Setting
Ch1~Ch4: Either choose some of 4Channel BSE sensors, or
You can amplify or decrease image signals in each Channel using Offset and Gain.
COMPO: It composes 4 Channel Signals.
It is used to divide Surface shape and different elements,
TOPO: It reverses the signals in symmetrical channels and composes them.
It is mainly used to see the three-dimensional effect of the surface shape.
Because a reversed Image of COMPO is necessary to observe the TOPO image,
1) select Ch1~Ch4 in +area and optimize the composed images,
2) select Ch1~Ch4 in –area and contrast them and composed images in +area, which
should be optimized as the images whose brightness is reversed,
3) select Ch1~Ch4 in +area again, and then
4) select TOPO.
TOPO Ratio : It determines the ratio of change when changing from COMPO
Mode to TOPO Mode.
(For the ratio of change, 1 is used as Default)
When changing from Compo Mode to Topo Mode, brightness is shown differently
depending on the properties of the sample. Increase the value of Topo Ratio if it is dark
and decrease that of Topo Ratio if it is bright.
(Because the value of Topo Ratio is very sensitive, change the value to second places of
decimals.)
For additional information on measuring of BSE, see [5.7 BSE].
Cal. Center
Cal. Center function is used to correct the position when Stage doesn’t conform to the
Beam Center exactly when it is moved to the center.
Arbitrary use is prohibited as it is preset before shipment.
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