EBARA EV-A10 - Page 13

P.13
PM10U
EBARA
CORPORATION
5. Operation ..................................................................................................37
5.1 Before Starting....................................................................................37
5.2 START / STOP ...................................................................................38
5.3 Operation when momentarily power failure happens...........................39
5.4 Gas Ballast .........................................................................................40
6. Maintenance and Inspection......................................................................41
6.1 Routine Inspection ..............................................................................41
6.2 Vacuum and Exhaust Piping ...............................................................41
6.3 Lubrication Oil .....................................................................................42
6.4 Maintenance Parts List........................................................................44
6.5 List of Waste During Maintenance ......................................................44
6.6 Repair and Serving .............................................................................45
6.7 Overhaul .............................................................................................45
7. Storage / Disposal.....................................................................................45
7.1 Storage ...............................................................................................45
7.2 Disposal ..............................................................................................45
8. Disconnection and Transportation .............................................................45
9. Troubleshooting ........................................................................................47
9.1 Basic trouble .......................................................................................47
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[Attachment Data]
 Appendix 1 : Material Safety Data Sheet of Lubricant oil (JPN)
 Appendix 2 : Material Safety Data Sheet of Lubricant oil (ENG)
 Appendix 3 : Overhaul / Repair Request form (JPN)
 Appendix 4 : Overhaul / Repair Request form (ENG)
 Appendix 5 : Leak Check procedure
 Information of Global Network