EBARA EV-A10 - Table of Contents; Contents

P.12
PM10U
EBARA
CORPORATION
(6) Contents
Environmental Basic Policies ········································································· 3
Forward ......................................................................................................... 4
(1) Limited Warranty ................................................................................ 5
(2) Repair and Servicing .......................................................................... 5
(3) Safety Notice ...................................................................................... 6
(4) Safety Warning Labels ....................................................................... 9
(5) Environmental Concerns ....................................................................11
(6) Contents .............................................................................................12
1. Acceptance Check ....................................................................................14
2. Product Description ...................................................................................15
2.1 Outline ................................................................................................15
2.1.1 Pump Module..............................................................................15
2.1.2 Cooling Fan ................................................................................15
2.1.3 Exhaust.......................................................................................15
2.2 Control System ...................................................................................15
2.2.1 Alarm Control System .................................................................15
2.3 The Way of Pump Moving...................................................................16
2.3.1 Preparation .................................................................................16
2.3.2 Moving Method ...........................................................................16
2.4 Detailed Specifications........................................................................17
2.4.1 Model Description .......................................................................17
2.4.2 Specifications .............................................................................18
2.4.3 Outline Drawing ..........................................................................19
2.4.4 Performance Curve.....................................................................21
2.4.5 System Flow ...............................................................................22
3. Installation .................................................................................................23
3.1 Location ..............................................................................................23
3.2 Piping..................................................................................................24
3.2.1 Vacuum and Exhaust Piping.......................................................24
3.3 Electrical Wiring ..................................................................................25
3.3.1 Power Supply Wiring ..................................................................25
3.3.2 Control Signal Wiring..................................................................29
3.3.3 Motor Protection Wiring ..............................................................31
4. Operational Panel......................................................................................32
4.1 Operational Panel Outline ...................................................................32
4.2 Operation Panel Display .....................................................................35