P.44
PM10U
EBARA
CORPORATION
6.4 Maintenance Parts List
Following parts are needed for maintenance in customer’s site.
Table 6.1 Spare (Maintenance) Parts List
1.Standard consumption Part.
Parts’ Name Type Part No.
Luburicant oil BARRIERTA J100ES C-0402-000-0111
2.Recommendable Spare Part. (Not needed for each pump.)
Parts’ Name Type Part No.
Oil level gauge ------ C-5350-000-7900
Following labels are attached to pump covers. When they are hard to read for discoloring or peeling
off, please stick them as directed.
Table 6.2 Labels
Label’s Name Part No.
[WARNING] HAZARDOUS VOLTAGE WARNING LABEL C-7110-313-0001
[WARNING] HIGH TEMPERATURE WARNING LABEL C-7110-312-0001
[DANGER] HAZARDOUS WEIGHT DANGER LABEL C-7110-316-0001
[CAUTION] CHARGE MARK LABEL C-7000-001-9600
6.5 List of Wastes During Maintenance
Tabele 6.3 lists wastes from general user maintenance. Dispose the wastes properly according to
your local waste disposal regulations in each area.
Table 6.3 List of wastes during maintenance
Part Equipped on Remarks
Lubricant oil Inside of pump module
See section 6.3
Refer to Appendix 1, 2 for Material Safety
Data Sheet
O-ring Connection of vacuum line Usual industrial waste
WARNING
When the lubrication oil level is lower than the lower limit, serious failure may be caused.
If you find out the shortage, add the oil immediately.
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