P.15
PM10U
EBARA
CORPORATION
2. Product Description
2.1 Outline
This pump has a compact design and includes controls to enhance reliability and operation.
This pump is suitable for use on clean and non-corrosive gases. Do not use explosive, flammable,
toxic or corrosive substances.
2.1.1 Pump Module
The pump is Roots type Dry vacuum pump, which rotates a pair of non-contact multi-stage rotors,
synchronized by timing gears.
The timing gears and bearings are enclosed in a compartment that is independent of the casing. For
lubrication Perfluoro-Polyether (PFPE) oil and grease are used. The pump is factory filled with
lubrication oil.
Use only the recommended lubrication oil grades shown in specification table 2.1 for replenishing or
replacing
2.1.2 Cooling Fan
Because the pump compresses gas from a vacuum to atmospheric pressure, compression heat is
generated. Therefore cool the pump with cooling fan.
Place the pump enough spaces from the stationary section.
FRONT / REAR / TOP : 100 mm or more
Both side : 50 mm or more
2.1.3 Exhaust
A check valve is provided as a standard accessory to prevent reverse flow of gas from the exhaust
through the pump to the vacuum chambar when pump is stopped.
2.2 Control System
This pump has a built-in measuring unit consisting of a Circuit Protector (CP), Noise Filter (NF), and
Inverter. During pump operation, some conditions are monitored, including electrical power and
current for motor. Continuous operation is possible when there is a momentarily power failure of 1sec
or less.
2.2.1 Alarm Control System
To assure the reliability of the pump as a vacuum exhaust system, the pump protection system
generates an ALARM signal. This signal output is generated and the pump will stop automatically
when the upper mechanical safety limit is reached during pump operation.
Be sure to contact EBARA for details on checking the ALARM setting condition.
All ALARM signal are displayed on the front panel. For remote operation and monitoring, the signal is
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