P.29
PM10U
EBARA
CORPORATION
3.3.2 Control Signal Wiring
Connect wires to the control connector for remote operation and remote monitoring.
Fig.3.4, Table 3.3 and 3.4 show the pin assignment.
Table 3.3 Control Connector Pin Assignment
Pin. No.
Signal name I/O Signal type
1 PUMP RUN (+) INPUT RUN : CLOSE
2 ALARM RESET (+) INPUT
RESET : CLOSE, Alternate
[note 1]
3 PUMP RUN/STOP STATUS (+) OUTPUT
RUN : CLOSE
4 ---
5 ---
6 ALARM STATUS (+) OUTPUT
ALARM : OPEN
7 ---
8 ---
9 PUMP RUN (-) [note 2]
10 ALARM RESET (-) [note 2]
11 PUMP RUN/STOP STATUS (-)
12 ---
13 ---
14 ALARM STATUS (-)
15 ---
[note 1]
RESET needs continuing signal over 5msec.
[note 2] 9 and 10 pins are short-circuited by internal wiring.
Fig. 3.4 15 Pin D sub-Miniature Female Receptacle
(As seen from connecting side)
Screw lock size : M2.6
1
11
1
8
88
8
15
1515
15
9
99
9
Connector pin surface : Au
Dsub-15pin Female