EBARA EV-A10 - Piping

P.24
PM10U
EBARA
CORPORATION
(3) To fix the pump, turn the holding nuts in the clockwise direction to lower the height-adjustment
feet and secure the pump.
(4) Adjust the height of the feet evenly to ensure that the pump base is level. The difference in height
between the two sides of the pump base shall not exceed 1mm.
The adjustment allowance is approximately 15 mm.
3.2 Piping
3.2.1 Vacuum and Exhaust Piping
Connect the vacuum and exhaust pipes to the suction and exhaust flanges.
A narrow clearance is maintained in the pump for rotor rotation. The ingress of foreign objects into
the pump interior will therefore prevent the pump from operating. Be sure therefore to need the
following cautions when making the pipe connections.
(1) Remove all foreign matter from inside the piping.
(2) When connecting, be sure that no dirt or dust particles adhere to the flange surfaces and/or that
the flange surfaces are damaged. Provide a suitable means of preventing the ingress of reaction
by-products adhering to the pipes and foreign objects. For this purpose, a filter may be installed.
(3) The weight of the pipes attached to the pump can cause misalignment and leaks from the flange
connections. Be sure therefore to support the piping properly and not to apply undue force when
aligning the flange faces. To reduce the transmission of vibration, it is recommended to insert
flexible bellows when connecting the pipes to the suction and exhaust flanges of the pump. The
length of the flexible bellows on the vacuum (suction) side will vary according to the vacuum
drawn. Be sure to connect so that no undue force can be applied to the flexible bellows.
(4) Please decide a part to connect to the pump exhaust so that the exhaust pressure is not beyond
atmospheric pressure.
CAUTION
If the pump is not leveled, shortage of the lubrication oil supply to the bearing may be
caused.
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NOTE
If the pump is not stable, vibration and noise of the pump may be increased.
WARNING
Be sure to check for leaks after you have installed the pump.
(Apply a pressure of 0.05 MPa or less for a leak check with pressurization.)
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WARNING
The pump casing, inlet piping and exhaust piping become extremely hot during
operation and for some time after stopping. Be sure that pump and exhaust piping do
not come in contact with humans or inflammable substances. Do not remove the pump
cover during operation.
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