P.41
PM10U
EBARA
CORPORATION
6. Maintenance and Inspection
6.1 Routine Inspection
Check periodically that ALARM signal is not output on the panel or remote output. When the ALARM
display appears, take action in accordance with Section 9. “Troubleshooting”.
Even when the cause of the ALARM signal has been removed, the signal will be maintained until the
RESET signal is entered. After you have taken the remedial action, press the RESET button on the
panel or the RESET signal from the control signal connector to reset the ALARM.
If any abnormal symptoms other than those displayed on the panel appear, take action in accordance
with the instruction of Section 9. “Troubleshooting”.
6.2 Vacuum and Exhaust Piping
Be sure to following the instructions below when carrying out maintenance work on the vacuum and
exhaust piping of the pump..
(1) Be sure to interrupt the power supply.
(2) After you have washed the piping, do not reconnect until it has dried completely.
DANGER
Be sure to keep the power supply to the pump turned off until you have finished the
wiring and connecting work. Also remove the power connector and interrupt the Circuit
Protector (CP) during this.
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WARNING
When an ALARM signal has been generated in the REMOTE operating mode, do not
start the maintenance tasks until you have interrupted the external RUN signal.
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WARNING
The pump and exhaust piping will remain at a high temperature during operation and for
a short time after the pump has stopped. Be sure to avoid contact and keep inflammable
substances out of reach. Do not remove the outer cover during operation.
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WARNING
Be sure to check for gas leaks after you have finished pipe maintenance work.
When checking for gas leaks by pressurization, please pressurize by less than 0.05
MPa.
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WARNING
The pump casing, inlet piping and exhaust piping become extremely hot during
operation and for some time after stopping. Be sure that pump and exhaust piping do
not come in contact with humans or inflammable substances. Do not remove the pump
cover during operation.
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