EBARA EV-A10 - Troubleshooting; Basic trouble

P.47
PM10U
EBARA
CORPORATION
9. Troubleshooting
9.1 Troubleshooting (1) Basic trouble
Abnormal symptom Check Item Corrective Action
Incorrect wiring. Check wiring. Circuit Protector is activated.
Short circuit. Replace or overhaul pump.
No power supply to pump. Check power supply.
CP is not ON. Place CP to ON.
No wiring of power supply. Connect power connector.
Nothing appears on the
operation panel.
Instrument failure. Replace instruments.
“Remote” mode has been selected. Set switch to “Local” mode.
Start-up conditions are not satisfied. Satisfy all start-up conditions.
Pump does not start when
applying START button.
Instrument failure. Replace instruments.
“Local” mode has been selected. Set switch to “Remote” mode.
Start-up conditions are not satisfied. Satisfy all start-up conditions.
Pump does not start when
entering external “RUN” signal
input.
Instrument failure. Replace instruments.
Pump starts suddenly. “RUN” signal was input before CP turns ON. Interrupt “RUN” signal before supplying power.
Adjustment feet are not applied. Use the adjustment feet.
Some object is making contact with the outer
cover.
Remove the object.
The fastening screws of the outer cover have
worked themselves loose.
Tighten the fastening screws.
Abnormal noise.
Excessive vibration
Parts of the pump are damaged. Replace or overhaul pump.
Vacuum pressure increase. Leak from vacuum piping. Check piping.
Pump overload. Check pressure and exhaust pipe.
Frequency order failure. Tune instruments up.
Parts of the pump are damaged. Replace or overhaul pump.
Rotation speed does not
increase.
Supplied voltage failure. Check power supply.
Pump overload. Check pressure and exhaust pipe. Display appears and ALM
lamp lights.
Parts of the pump are damaged. Replace or overhaul pump.
Supplied voltage is overflow. Input regular voltage. Display appears and ALM
lamp lights.
Exhaust gas is backstreaming. Prevent reflux.
Supplied voltage is insufficient. Input regular voltage.
Incorrect wiring. Check wiring.
Momentary power failure occurs. Check power supply.
Display appears and ALM
lamp lights.
Instrument failure. Replace instruments.
Supplied voltage is insufficient. Input regular voltage. Display appears and ALM
lamp lights.
Instrument failure. Replace instruments.
Exhaust gas is running back. Prevent reflux.
Parts of the pump are damaged. Replace or overhaul pump.
Display appears and ALM
lamp lights.
Pump overload. Check pump load.
Display appears and ALM
lamp lights.
Inverter overheat. Cool down inverter.
Pump overload. Check pump load. Display appears and ALM
lamp lights.
Parts of the pump are damaged. Replace or overhaul pump.