P.46
PM10U
EBARA
CORPORATION
Toxic gases may be generated from by-products in the piping or pump in pump disconnection from
the tool piping for repair and replacement or flange removal for maintenance. Gain relevant
information about the process gases from your tool suppliers, and be sure that the gas
concentrations in the work areas are at quarter or under the acceptable values specified using
appropriate measurement equipment.
Without assurance of gas safety, instruct the workers to wear proper personnel protective equipment
if necessary to protect them from gas hazards. The personnel protective equipment must include at
least gloves, safety goggles, and a gas mask.
To disconnect and transport the pump, proceed as follows.
(1) Stop the pump and replace all gases inside the pump by purging them with dry clean air.
When the pump has been used for toxic or flammable gases, replace all gases inside the
pump by purging them with N
2
gas.
(2) Switch off the power supply to the pump and remove the power and signal wires.
(3) Remove the vacuum and exhaust pipes and completely seal off the suction and exhaust
ports of the pump with a blind flange or similar seal. Seal off all process gas discharge points
such as the differential port by using a blind flange.
(4) Wrap the pump in a vinyl sheet.
(5) Use the lifting eye bolts provided on the pump for slinging the pump to load and unload.
Fasten eye bolts completely and push in until flush with the seating surface. For sling, use a
wire with a length so that the slinging angle (that is, the angled subtended by the two wires) is
within 60 degrees.
(6) For transportation, secure the pump by lowering the adjustment feet. Place a protective cloth
around the pump to avoid shock and position rotective members between the outer cover
and the wires in order to distribute the load of the fastening wires.
DANGER
Do not enter the zone underneath the suspended ump.
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WARNING
For lifting the pump, use only qualified operator personnel.
Be sure that the wire rope and crane used for lifting the pump are in proper order and
match the weight of the pump.
To prevent unequal weight distribution, suspend the pump by ensuring that the slinging
angle remains symmetrically centered.
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