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Edwards EXT70 User Manual

Edwards EXT70
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B722-40-880 Issue F
Page 66 © Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Service, spares and accessories
7.4.8 PRX purge restrictor
The PRX10 is a modified DN10NW centring ring that filters the purge gas and restricts its flow rate to the
recommended flow of 25 sccm. A vent port adaptor must be fitted to the purge port in order to connect a purge
restrictor to the pump.
7.4.9 Vibration isolators
In applications where the small amount of vibration generated by the compound turbomolecular pump is a problem,
a vibration isolator can be fitted. The isolator consists of two special flanges separated by a flexible bellows and a
rubber, anti-vibration, outer collar. The vibration isolator required depends on the pump inlet flange size.
Note: The vibration isolator is designed for use with vertically mounted pumps only.
7.4.10 FL20K foreline trap
The foreline trap minimises oil vapour back-streaming from the backing pump and is recommended where the highest
system cleanliness is required.
7.4.11 Podule connector plug
A Podule connector plug can be fitted to the DX pump to drive a TAV vent valve or an ACX air cooler.
7.4.12 TIC turbo and instrument controllers
There are three different types of controller available. The first is an Instrument Controller (IC), used to control
gauges only and is not suitable to power an EXT turbo pump or backing pump. The second is a Turbo Controller (TC),
used to control just a 24 V EXT turbo pump and a backing pump. The last is a Turbo Instrument Controller (TIC), used
to control a 24V EXT turbo pump, backing pump and up to 3 gauges.
Purge restrictor Flange size Item Number
PRX10 NW10 B580-65-001
Flange Size Item Number
DN63ISO-K B581-15-000
DN63CF B581-01-000
DN100ISO-K B581-20-000
DN100CF B581-05-000
Foreline trap Item Number
FL20K A133-05-000
Product Item Number
Podule connector plug B722-40-808
Controller Type Item Number
TIC Turbo Controller (100 W) D397-11-000
TIC Turbo Controller (200 W) D397-12-000
TIC Turbo and Instrument Controller (100 W) D397-21-000
TIC Turbo and Instrument Controller (200 W) D397-22-000

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Edwards EXT70 Specifications

General IconGeneral
BrandEdwards
ModelEXT70
CategoryWater Pump
LanguageEnglish

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