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PRX10 purge-restrictor
B580-65-880 Issue G
Figure 28 - PRX10 purge-restrictor
Table 7 - Nitrogen flow rate through the PRX10 purge-restrictor
Nitrogen supply pressure Nitrogen flow rate
bar gauge bar absolute Pa sccm mbar l s
-1
Pa l s
-1
0.0 1.0 1.0 x 10
5
25 0.42 42
0.5 1.5 1.5 x 10
5
38 0.63 63
1.0 2.0 2.0 x 10
5
50 0.83 83
1.5 2.5 2.5 x 10
5
63 1 100
2.0 3.0 3.0 x 10
5
75 1.25 125
2.3 3.5 3.5 x 10
5
88 1.5 150
3.0 4.0 4.0 x 10
5
100 1.7 170
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