© Edwards Limited 2008. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
B580-65-880 Issue G
1Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards range of accessories for
the following EXT pumps:
z EXT70 and EXT70H turbomolecular pumps.
z EXT75DX and EXT75iDX compound molecular pumps.
z EXT250 and EXT250M turbomolecular pumps.
z EXT250H and EXT250Hi compound molecular pumps.
z EXT255H and EXT255Hi compound molecular pumps.
z EXT255DX and EXT255iDX compound molecular pumps.
z EXT351 and EXT501 turbomolecular pumps.
z EXT555H, EXT555HF, EXT555Hi, EXT555H
E
and EXT556 compound molecular pumps.
z EXT406PX and EXTPX split flow compound turbomolecular pumps.
The accessories are shown in Figure 1 and 2. The Item Numbers for the accessories are listed in the appropriate
sections. You must use the accessories as specified in this manual. Read this manual before you install accessories
onto your EXT pump.
Important safety information is highlighted as WARNING and CAUTION instructions; you must obey these instructions.
The use of WARNINGS and CAUTIONS is defined below.
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of measurement. When flow
rates are specified, the abbreviation 'sccm' is used to mean 'standard cm
3
min
-1
: this is a flow of 1 cm
3
min
-1
at an
ambient temperature of 0 °C and a pressure of 1013 mbar (1.013 x 10
5
Pa).
In accordance with the recommendations of EN61010, the following warning labels may appear on the pump or its
accessories:
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