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EXT70
Edwards EXT70 User Manual
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B722-40-880 I
ssue F
Page 20
© Edwards Li
mited 2013. All r
ights reserved.
Edwards and the Edward
s logo a
re trademarks of Edwards Limited.
Installation
Figure 5 - T
ypical pumping system with a DX pump
1.
V
acuum system
2.
High-vacuum gaug
e
3.
Vibratio
n isolat
or
4.
Inl
et screen
5.
DX pump
6.
Backi
ng valve
7.
V
a
cuum gauge
8.
Flexible bellows
9.
Foreli
ne trap
10.
Rotary backing pump
11.
Mis
t filter
12.
V
ent valve
13.
Alternati
ve position f
or vent valv
e
14.
Air cool
er
15.
PRX purge restrictor
16.
Regulated purge g
as supply
17.
WCX water cooler and connections
27
29
Table of Contents
Contents
5
Illustrations
7
Tables
8
Trademark credits
8
1 Introduction
9
1.1 Scope and definitions
9
1.2 General description
9
1.3 Drive electronics
10
1.4 Operational features
11
1.4.1 Power limit setting
11
1.4.2 Standby speed
11
1.4.3 Timer
11
1.4.4 Analogue output
12
1.4.5 Automatic vent options
12
1.4.6 Normal speed setting
12
1.4.7 Electronic braking
13
1.5 Logic interface
13
1.5.1 Parallel control and monitoring
13
1.5.2 Full serial control
14
1.5.3 Serial control with parallel monitoring
14
1.5.4 Parallel control with occasional serial monitoring or serial setup
14
1.5.5 Podule configuration (serial setup)
14
2 Technical data
15
2.1 General
15
2.2 Pumping media
15
2.3 Vent gas specification and vent control data
21
2.4 Purge gas specification
22
2.5 Cooling water
22
2.6 Materials exposed to gases pumped
22
2.7 Electrical data
23
2.8 Logic interface connector
23
2.9 Podule connector socket
24
2.10 Indicator LEDs
26
2.11 Operating and storage environment
26
3 Installation
27
3.1 Unpack and inspect
27
3.2 Typical installation
27
3.3 Connection to the vacuum system
27
3.3.1 Inlet screen (supplied fitted)
29
3.3.2 Mechanical fixing
30
3.3.3 Inlet connection and orientation
30
3.3.4 Base mounting
30
3.3.5 Backing connection
31
3.3.6 Interstage connection (iDX variants only)
31
3.4 Purge gas connection
32
3.4.1 Connect the purge gas
32
3.4.2 Recommended purge gas flow
32
3.5 Electrical installation
32
3.5.1 Introduction
32
3.5.2 Earth (ground) connections
32
3.5.3 Connect the logic interface to the TIC
32
3.5.4 Connect the logic interface to the customer control equipment
32
3.5.5 Connect the electrical supply
33
3.6 Parallel interface mode
34
3.7 Serial interface mode
35
3.7.1 Connect the serial interface to the customer control equipment
35
3.7.2 Serial enable
36
3.7.3 Serial protocol
36
3.7.4 Message structure
37
3.7.5 Command set
38
3.7.6 Simultaneous parallel and serial operation
38
3.7.7 Multi-drop mode
41
3.8 Vent options, vent valve connection and control
42
3.8.1 Manual vent valve
42
3.8.2 TAV5 or TAV6 solenoid vent valve
42
3.8.3 Controlled venting
42
3.8.4 Alternative valve connected to the vacuum system
43
3.9 Cooling
44
3.9.1 Introduction
44
3.9.2 Forced air cooling
44
3.9.3 Water cooling
44
4 Operation
47
4.1 Configuring the DX pump using serial commands
47
4.1.1 Power limit setting
47
4.1.2 Powering a fan from the podule
48
4.1.3 Controlled venting options
48
4.1.4 Standby speed setting
49
4.1.5 Normal speed setting
49
4.1.6 Timer setting and options
50
4.1.7 Analogue signal options
51
4.1.8 Electronic braking options
51
4.1.9 Factory settings
52
4.1.10 Assigning a multi-drop address
52
4.2 Configuring the DX pump using a TIC
53
4.3 Start-up
53
4.3.1 Close the vent valve
53
4.3.2 Pre-start checks
54
4.4 Operation with parallel control and monitoring
54
4.4.1 Start the pump
54
4.4.2 Running at standby speed
54
4.4.3 Stop the pump
54
4.4.4 Parallel monitoring
55
4.5 Operation with serial control and monitoring
55
4.5.1 Delayed start
55
4.5.2 Start the pump
55
4.5.3 Standby speed
55
4.5.4 Stop the pump
56
4.5.5 Temperature readings
56
4.5.6 Link parameter readings
56
4.5.7 Measured motor speed
56
4.6 Simultaneous parallel and serial operation
57
4.7 Operation with a TIC
57
4.8 Decelerating and venting
57
4.9 Operation at extreme conditions
57
4.9.1 Operation with high inlet pressure
57
4.9.2 Operation at high temperatures
58
4.9.3 Operation at over-speed
58
4.9.4 Electrical supply failure
58
4.10 Bakeout
59
5 Maintenance
61
5.1 Introduction
61
5.2 Bearing maintenance
61
5.3 Rotor life
61
5.4 Clean the external surfaces of the pump
61
5.5 Fault finding
62
5.5.1 Flashing error codes
64
5.5.2 Decoding system status words
64
5.5.3 Useful service information
67
6 Storage and disposal
69
6.1 Storage
69
6.2 Disposal
69
7 Service, spares and accessories
71
7.1 Introduction
71
7.2 Service
71
7.2.1 Returning a pump for service
71
7.3 Spares
71
7.3.1 ISX inlet screen
71
7.3.2 Inlet strainer
72
7.3.3 Inlet flange seals
72
7.4 Accessories
72
7.4.1 Installation
72
7.4.2 ACX air cooler
72
7.4.3 WCX water cooler
72
7.4.4 BX bakeout band
73
7.4.5 TAV vent valve and vent port adaptor
73
7.4.6 VRX vent restrictor
73
7.4.7 Vent port adaptor
73
7.4.8 PRX purge restrictor
74
7.4.9 Vibration isolators
74
7.4.10 FL20K foreline trap
74
7.4.11 Podule connector plug
74
7.4.12 TIC turbo and instrument controllers
74
7.4.13 TIC PC Program
75
4
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Edwards EXT70 Specifications
General
Brand
Edwards
Model
EXT70
Category
Water Pump
Language
English
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