Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 45
4
OPERATION
Pin Description
Terminals for inputting power for driving the air cooling unit.
The voltage input to these terminals is output to the specified terminal
block through operation of the STP pump.
Terminals for connecting the air cooling unit. The voltage input to AC.
POWER terminals (1)-(2) is output to these terminals when the STP
pump is in acceleration or rated operation.
The voltage is cut OFF when the STP pump is under the BRAKE state.
Not-used.
DO NOT use these terminals.
Terminals for outputting the POWER ON state signal. These terminals
are closed when the magnetic bearing functions and the rotor
levitates.
This signal is cut OFF at a power failure.
Terminals for outputting the ALARM signal.
When an abnormality/error is detected under the POWER ON state,
the terminals between (10)-(9) are closed, and the terminals between
(10)-(11) are opened.
However, when the rotational speed is less than 20,000 rpm during
power failure backup operation, this signal is not output.
Terminals for outputting the BRAKE state signal.
These terminals are closed when the STP pump is in brake.
However, when the rotational speed is less than 20,000 rpm during
power failure backup operation, this signal is not output.
Terminals for outputting the NORMAL OPERATION state signal.
When the STP pump is in rated operation, the terminals between
(16)-(13) are closed, and the terminals between (16)-(15) are opened.
Terminals for outputting the ACCELERATION state signal.
These terminals are closed when the STP pump is in acceleration.
Terminals for outputting the STP pump REMOTE SELECTION state
signal.
When the MANUAL/REMOTE changeover switch on the STP front
panel is set to ON (remote side), these terminals are closed (REMOTE
operation).
However, when the rotational speed is less than 20,000 rpm during
power failure backup operation, this signal is not output.
Table 8 - I/O TB1 terminal block
(1)
(2)
AC. POWER
N1 IN L1
(3)
(4)
FAN
N.O OUT
(5)
(6)
(7)
(8)
POWER
N.O OUT
(17)
(18)
ACC
N.O OUT
(19)
(20)
⑳
REMOTE
N.O OUT
(9)
(11)
N.O N.C
ALARM OUT
COM
(10)
(12) (14)
BRAKE
N.O OUT
(13)
(15)
N.O
(16)
NORM OUT N.C COM