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Edwards SCU-350 Series

Edwards SCU-350 Series
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SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 47
4
OPERATION
A.
Power input terminals for
the air cooling unit
F.
BRAKE state signal
output terminals
B.
Terminals for
the air cooling unit
G.
NORMAL OPERATION state
signal output terminals
C.
Not used H.
ACCELERATION state
signal output terminals
D.
POWER ON state
signal output terminals
I.
REMOTE selection state
signal output terminals
E.
ALARM state signal
output terminals
Figure 29 - I/O TB1 remote output signal terminal block
(
1
)
(
2
)
(
3
)
(
4
)
CR1
(
5
)
(
6
)
(
7
)
(
8
)
CR3
(
9
)
(1
0
)
1
1
CR4
(1
2
)
(1
4
)
CR5
( )
CR4
2
0
1
5
(1
3
)
(1
6
)
CR6
(1
7
)
(1
8
)
CR7
( )
CR6
(1
9
)
( )
CR8
A
B
C
D
E
F
G
H
I

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