Edwards STP-iXA3306CV

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STP-iXA3306 Series Turbomolecular Pump

MT-82E-001-H

Page 164

MAINTENANCE AND INSP

ECTION

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Main Page

Declaration of Conformity2
Table of Contents3
Introduction13
Scope and Definitions13
Applied Standards14
Limited Warranty15
- Warranty Period15
- Item Warranted15
- Disclaimer15
- Spare Parts16
Precautions for Safe Operation of the STP Pump17
- Usable Gases17
STP Pump Installation Warning Label18
Hot Surface Warning Label18
Maintenance and Inspection Precautions18
Labels18
Heavy Product Caution Label19
High Voltage Device Caution Label19
Rotation Instruction Label19
Cross Sectional View of the STP Pump20
Operation Principle of the STP Pump20
STP Pump Specification22
Technical Data25
STP Pump Specifications25
Maximum Gas Flow-Rate (STP-Ixa3306C)26
Maximum Gas Flow-Rate (STP-Ixa3306Cv)26
- STP-Ixa3306B/Bv27
Maximum Gas Flow-Rate26
- STP-Ixa3306C/CV26
Maximum Gas Flow-Rate (STP-Ixa3306B)27
Maximum Gas Flow-Rate (STP-Ixa3306Bv)27
Water Cooling Use Condition28
Control Unit29
External Appearance of STP-Ixa3306C(V)/Ixa3306B(V)31
External Appearance of the STP Pump31
Label Affixing Positions32
Installation of the Stp Pump33
Precautions before Installation33
- Operating Environment33
Environmental Requirements for Installation34
- Installation Area35
Space Around the STP Pump35
- Bench36
- Insulation Test36
Eyebolt Size37
Example of Lifting the STP Pump37
Unpacking37
- Unpacking the STP Pump37
Example of Lifting the STP Pump (Horizontal Positioning)38
Jack-Up the STP Pump39
Control Unit Bottom Face39
Prohibited Matter40
STP Pump with Eyebolts40
Pump Functions41
- Name and Function of the Control Unit42
Configuration of the STP Pump41
Name and Function of each Part41
- Name and Function of the Pump41
Control Unit (Front Panel)42
Control Unit Front Panel Functions43
Control Unit Front Panel Functions (Continued)44
Installation of the STP Pump to the Vacuum Equipment45
- Cleaning the Seal46
- STP Pump Installation Positions47
How to Install the STP Pump45
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump47
- Secure the STP Pump48
Tightening Torque of Bolt48
Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange49
Shape of Reduced Diameter Shank Bolts51
Methods of Securing the STP Pump51
- Legs for Securing the Base52
Screw Holes for Securing the Base52
- Power Cable53
Connecting Method of the Power Cable54
- How to Connect the Power Cable55
Precautions of Vacuum Piping57
- Vacuum Piping Method57
Connecting the Purge Port58
Connecting the Water Cooling Pipe59
Positions of the Cooling Water Port59
Attaching a Baking Heater60
Baking Heater Installation Position60
Installation of the TMS Unit61
- TMS Unit Specification61
- Configuration of the STP Pump with the TMS62
Configuration of the TMS62
- TMS Heater63
- Connecting the TMS Heater Cable63
- TMS Valve63
- Connecting the Pump and TMS Valve64
TMS Valve Connection64
Connecting to Semiconductor Equipment65
- 3.10.1 Connecting to Power65
- Emergency off Circuit (EMO Circuit)65
Operation67
Gas Pumping, Cooling and Baking the STP Pump67
- Gas Pumping67
- How to Introduce a Purge Gas68
Cooling the STP Pump68
- Water-Cooling Method68
Baking the STP Pump69
Before Starting the STP Pump70
- Confirmation before Starting70
- Confirmation of Vacuum System70
Powering on71
Pump Operation71
- Input Operation Port Setting71
- Starting/Stopping the STP Pump72
Starting/Stopping the STP Pump Using Contact Input (X2 REMOTE)72
Pump Operation Method 1 (Contact Input)72
Pump Operation Method 2 (Contact Input)72
Starting/Stopping the STP Pump Using Voltage Input (X2 REMOTE) (Voltage Input)73
Pump Operation Method 1 (Voltage Input)73
Pump Operation Method 2 (Voltage Input)73
Reset Operation (X2 REMOTE)74
How to Start/Stop the STP Pump74
- Starting the STP Pump after Stopping74
- Starting the STP Pump after a Safety Function Operates74
- Powering off74
LED Indications for each State75
Led75
35 "ROTATION" LED Indication75
Parallel Port Input/Output Signal76
- Input Signal Pins76
X2 REMOTE Connector76
X2 REMOTE Input Signal Pins77
X2 REMOTE Input Signal Pins (Continued)78
X2 REMOTE Input Signal Pins (Contact Input)79
X2 REMOTE Input Signal Pins (Voltage Input)80
X2 REMOTE Input Signal Pins (Voltage Input) (Continued)81
X2 REMOTE Input Signal Pins (Voltage Input)82
- Input Operation Port Setting83
- Rotation INHIBIT Signal84
Rotation INHIBIT Signal Input84
- Second Speed Option85
Second Speed Function85
- Output Signal Pins86
X2 REMOTE Output Signal Pins87
X2 REMOTE Output Signal Pins (Continued)88
X2 REMOTE Output Signal Pins88
Operating the TMS Unit (for Use with the TMS Unit)90
- 4.10.1 before Starting90
- 4.10.2 Starting/Stopping90
- 4.10.3 Setting the TMS Unit Function90
Serial Communication Protocol91
Introduction91
Serial Port91
Connection and Setting up92
- Signal Connection92
X3/X4 Pin Position92
X3/X4 Connector (D-Sub9)93
- Connecting the RS48594
RS485 Connections94
- Communication Parameter Setting95
Communication Parameters95
- Input Operation Port Setting96
Input Operation Port96
- Serial Communication Timeout Setting97
Serial Communication Time out Setting97
- Recommended Items about Communication Cable Installation98
Grounding Example (both Ends Grounding)98
Grounding Example (Single Point Grounding)98
Example of Ring Ferrite Core Installation99
Example of Cable Installation in Metallic Duct99
Example of Differential Signal Waveform100
Protocol Specifications101
- General Description101
PC to SIM Communication101
- Standard Transmission Frame102
Transmission Control Characters102
- (In the RS232/RS485 Single Point Connection)103
- Query Command104
- (In the RS232/RS485 Single Point Connection)104
- Transmission Data Format105
- Frame Control (Checksum)106
- Error Control106
- Transmission Frame in the RS485 Multi-Point Connection106
- Control Command in the RS485 Multi-Point Connection108
- 5.3.10 Query Command in the RS485 Multi-Point Connection109
- 5.3.11 Broadcasting Command in the RS485 Multi-Point Connection110
Pump Operation Commands110
- 5.3.12 Application Note111
Block Diagram of Communication Process Example111
Example of Answer Resending Process112
Example of Response When the Command Is Sent Continuously112
Example of Command Sending During Answer Data Reply112
Example of Communication Cycle Process113
Example of Command Sending Process114
Example of Answer Receiving Process114
Command Specifications115
- Command List115
- Readmeas116
- Command116
- Readfailmess117
Pump Operation Commands117
Error Message Values119
Error Message Values (Continued)120
- Readmodfonct121
Pump Operation Mode122
- Readversion123
- Readcounters124
- Readsetpoint125
- Readmotortemp125
- 5.4.10 Readstatus126
- 5.4.11 Readevents127
Remote Mode127
- 5.4.12 Setspeedsetpoint128
- 5.4.13 Readspeedsetpoint129
- 5.4.14 Readmodfonctwithwarning130
Warning Value Bit Assign131
- 5.4.15 Readmeasvalue133
- 5.4.16 Readoptionfunc135
Parameter Setting Value136
- 5.4.17 Setoptionfunc138
- 5.4.18 Readcondition140
- 5.4.19 Readeventswithtime142
- 5.4.20 Setoptions146
Option Function Number and Parameter List146
Second Speed Option Setting146
5.4.20.2 Second Speed Selection147
- 5.4.21 Readoptions148
5.4.21.1 Second Speed Function Setting148
Option Function Number and Parameter List148
Second Speed Select149
Stp-Link and Display Unit151
STP-Link151
Functions of STP-Link151
Display Unit152
Display Unit Idt-001152
Safety Functions153
- Power Failure153
- Operation after a Power Recovery154
States of Leds and X2 REMOTE Output Signals at Power Failure154
- Abnormal State of Magnetic Bearing (Disturbance)155
- Excessive Vibration (Disturbance)155
- Motor Driver Overload (DRV Overload)155
- Overheating Inside the STP Pump (MOTOR Overheat)155
- Overheating Inside the Control Unit (CNT Overheat)155
- Overspeed156
- Abnormality/Error in the TMS Unit (for Use with the TMS Unit)156
WARNING" Function157
WARNING Function157
WARNING Output158
Contents of WARNING Function159
- First Damage Limit159
- Second Damage Limit159
- Pump Run Time over159
- Pump Overload160
- Imbalance160
Default Setting of WARNING Function161
Factory Setting and Variable Range161
WARNING Function Setting161
Error List162
Troubleshooting Immediately after Failure Occurs162
- After Power Failure162
- After Other Abnormality/Error162
Priority of Failure Signal163
Failure Output163
Troubleshooting163
- Indication of "FAILURE" LED (Red)163
Error List (Continued)165
Error List (Continued)166
Error List (Continued)167
Error List (Continued)168
Error List (Continued)169
- Indication of "FAILURE" LED (Green)170
- No Indication of the "FAILURE" LED170
Troubleshooting with no Indication of the "FAILURE" LED170
Maintenance and Inspection171
Cleaning172
Inspecting the Deposit172
Maintenance173
- Recommended Overhaul Intervals173
- Standard Replacement Parts173
- Recommended Maintenance Intervals for Main Parts174
Transporting for Repair or Overhaul175
Storage and Disposal177
Storage of the STP Pump177
Disposal178
Service, Spares and Accessories179
Introduction179
Service179
Spares179
Accessories180

Edwards STP-iXA3306CV - Page 176

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