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HNC Electric HSD7-E Series - Momentary Power Interruption Operation; SEMI F47 Specification Support Function

HNC Electric HSD7-E Series
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43
In addition, through Pn408 = n

X
(speed limit selection), the upper speed limit value used for the speed
limit value can be selected from "motor maximum speed" and "overspeed alarm detection speed". When
limited by a speed equal to the maximum speed of the motor, select "Overspeed Alarm Detection Speed".
Parameter
Meaning
Effective
time
Category
Pn408
n.0
[Factory setting]
The speed limit value uses "motor maximum speed", the smaller
of Pn407 settings.
Power
restart
Setup
n.1
The speed limit value uses "speed detected by overspeed
alarm", the smaller of the Pn407 set values.
(Note) When using a rotary servo motor, Pn407 (speed limit during torque control) is set.
Pn407
Speed limit during torque control
Spee Torque
Setting range
Setting Unit
Factory setting
Effective time
Category
010000
1 min
-1
10000
Effective
immediately
Setup
(Note) Even if the set value exceeds the maximum speed of the servo motor used, the actual speed will be limited to the maximum
speed of the servo motor used or the overspeed alarm detection speed.
External Speed Limit Function
When selecting the external speed limit function through Pn002=n.X, the motor speed is limited by the
speed limit value (VLIM).
6.2 Operation for Momentary Power Interruptions
By setting, even if the power supply of the servo drive main circuit is turned OFF instantaneously, the motor
can cONtinue to be powered on (servo on) according to the time set by Pn509 (instantaneous power failure
holding time).
Pn509
Transient outage holding time
Speed Position Torque
Setting range
Setting Unit
Factory setting
Effective time
Category
2050000
1 ms
20
Effective
immediately
Setup
When the instantaneous power failure time is less than the set value of Pn509, the motor will continue to be
powered on, and when it is greater than the set value, the motor will no longer be powered on. When the main
circuit power supply is restored, the motor will be powered back on.
1. When the instantaneous power failure time is greater than the set value of Pn509, the servo
ready output (/S-RDY) signal is OFF and the servo is OFF.
2. The control power supply and the main circuit power supply can cope with power outages of
more than 5000ms when using non-power-off equipment.
3. The holding time of servo drive control power supply is about 100ms. The control power
supply cannot be controlled during an instantaneous power failure. When the same
processing as the normal power supply OFF operation is performed, the Pn509 setting will be
invalid.
Important
The holding time of the main loop power supply varies depending on the output of the servo
drive. This setting is invalid when the load of servo motor is large and "A.410 (under voltage
alarm)" occurs during instantaneous power failure.
6.3 SEMI F47 Specification Support Function
SEMI F47 support function refers to the function of detecting A.971 (under voltage) warning and limiting the
output current when the DC voltage of the main circuit inside the servo drive falls below the specified value
due to instantaneous power failure or temporary low power supply voltage of the main circuit.
This function supports SEMI F47 specifications required by semiconductor manufacturing devices.
This function is used in combination with the setting function of the instantaneous power failure holding time
(Pn509), and can continue to operate even when the power supply voltage is reduced, so that no shutdown is
caused due to alarm, and no recovery operation is required.
Supplementary
notes
Main circuit
power supply
Instantaneous power failure occurs when the set
value of Pn509 is instantaneous stop time
Instantaneous power failure occurs when the set
value of Pn509 is < instantaneous stop time
Instantaneous power failure occurred
Pn509 set
point
Electrical
machine
energized state
Main circuit
power supply
Instant stop time
≤Pn509
Instant stop time >
Pn509
Pn509 set
point
Electrical
machine
energized state
The motor is
energized
The motor is
energized
Continue to energize
the motor
Instantaneous power failure occurred
The motor is not energized
Power cut off

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