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ME12058B
Maintenance Section
(1) XRR Recipe
Items Contents Notes
Analysis Recipe
Enter the name of analysis recipe.
Recipe
Choose [XRR] to create XRR analysis recipe.
Optics
Choose [Optics2] for XRR measurements.
Slit
Enter slit width ([DS], [RS1], [RS2]). Approx. 0.1
~0.2mm
Geometry
Adjustment
Check this box for XRR measurements.
Reflection
Enter smaller angle than the critical angle of sample. Approx. 0.3 degrees
Adjust Cnts.
Enter the number of adjustments. 1 or 2 times
Adjust Mode
Choose [Omega] for XRR measurements.
Z
Enter scan conditions of z axis.
([Start], [End], [Step], [Speed])
[Start] and [End] are relative positions from the
current position.
If [Adjust Mode] is
chosen [Omega],
these values are
ignored.
Omega
Enter scan conditions of omega axis.
([Start], [End], [Step], [Speed])
[Start] and [End] are relative positions from the
current position.
[Start] : -0.1
~ -0.2
[End] : 0.1
~ 0.2
[Step] : 0.001
~ 0.002
[Speed] : 1
~ 2
Scan Type
Choose [2Theta/Omega] for XRR measurements.
Fix Angle
Not used for XRR measurements.
#1 ~ #4
Enter scan conditions of [Scan Type].
([Start], [End], [Step], [Speed])
[Start] and [End] are relative positions from the
adjustment position.
If dividing scan region, check and enter [#2]
~ [#4].
All [Step] are same
value.
Fig. 8-2-4 Create Analysis Recipe (XRR) dialog box
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