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ME12058B
Maintenance Section
Items Contents Notes
Off angle
Enter 0.0 for XRR measurements.
Analysis
When performing auto analysis of XRR profile,
check this box.
Condition
Specify an existing recipe file by creating GXRR
software.
[…] button is
available to specify.
Save
Save the analysis recipe.
NOTE : Click the [Save] button, when editing is completed.
If the dialog box is closed without clicking on this button, the recipe is not changed.