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ME12058B
Maintenance Section
(3) Laser Hazards
NOTE
This instrument uses a wafer aligner which is an FDA Class 1 laser product (λ:
780 nm, Pmax. : 1.7 mW, Mode : Continuous).
The MFM65 system has no risk of laser exposure during normal operation
because this system has a complete enclosure shield for laser light and interlock to
avoid laser exposure.
(Refer to “2.3 Interlock List”.)
(4) Mechanical Hazards
WARNING
Be sure that the power switch is off when maintenance within the equipment is
attempted. However, during the adjustment of some components, the power must
be on. In this case, take due care to avoid injury from mechanical parts.
When squatting down to work, for example when turning on the PC, take due care
to avoid injury from hitting your head against any mechanical projections.
NOTE
When heavy parts or units are removed, for example a PC or an X-ray tube shield,
lift these objects with a coordinated effort by 2 or more persons.
(5) Material Hazards
WARNING Metal beryllium foil is used for the windows of X-ray tubes and X-ray
detectors (APD, SDD). Solid beryllium usually has no influence on human
health, but evidence exists that the person who inhales the beryllium powder or
vapor risks a possibility of serious injury or death. Do not scratch, polish, and
chemically clean beryllium foil, nor bake up to temperature so as to generate
vapor or powder. In case that beryllium window is ruptured, do not touch chips of
the beryllium window, and contact Rigaku Service personnel.
Then dispose them according to local regulations.
(Refer to the attached MSDS.)
WARNING Lead is used in the sealed maintenance-free built-in battery of the UPS.
Do not break up the battery when it is replaced.
Dispose of batteries according to local regulations.
(Refer to the attached MSDS.)
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