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ME12058B
Maintenance Section
WARNING Mechanical lubricating grease is used in this equipment.
This grease usually has no influence on human health, but dispose according to
regulations and local regulations.
(Refer to the attached MSDS.)
WARNING
Other toxic substances in the MFM65 system are lithium compound and mercury
compound.
A lithium compound is used in the built-in batteries of X-ray hour meter and
PC.
A mercury compound is used in the fluorescent light for maintenance.
These materials usually have no influence on human health, but dispose of them
according to local regulations.
(Refer to the attached MSDS.)
WARNING Ethanol of the customer’s FAB may be used to clean the transfer line by the
maintenance personnel.
(Refer to the attached MSDS.)
(6) Fire Hazards
WARNING
Plastics and electric cables used in the MFM65 are class V0 or V1.
If smoke occurs from the equipment, push an EMO Switch.
(7) Hot Surface Hazards
CAUTION
A halogen lamp is used in the light unit for pattern recognition.
Do not touch before cooling.
Wear safety gloves, when lamp exchanging this lamp.
(8) Trip Hazards
CAUTION
The PC rack in the left lower side of the main module can be pulled out for the
maintenance.
Take care not to trip over it.
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