WARNINGS AND SAFETY PRECAUTIONS
MJB4 - Warnings and Safety Rev07 05-10 5
1
1.6.1.2. Changing the Lamp
Only use lamps of a type approved for use by SUSS
MicroTec Lithography!
Caution!
In almost all exposure lamps, the anode
(positive pole) is at the
bottom.
Only the 500W DUV Hg/Xe lamp (Ushio)
position is reversed.
After changing the lamp type or replac-
ing a CIC1200, CPC200 or CPC350 it is
essential to check the correct polarity
of the lamp and correct type selection
on the CIC1200 before switching on the
lamp!
Always follow the lamp manufacturer's directions!
When fitting or removing the lamp, avoid any me-
chanical load acting on the glass tube! Only tighten
the lamp by hand!
Pay attention to the correct handling of different
lamp mountings (depending on the lamp house
type) - see Servicing section in the manual!
Connect the connection contacts on the lamp in
such a way that electrical contact resistances are
minimized. Replace all components which show
traces of corrosion or overheating!
1.6.1.3. Setting Regulations for Lamp
Cooling
The UV-exposure lamps must be cooled in a con-
trolled way in order to maintain safe and optimum
operating conditions. The cooling should be set up
individually according to the lamp type.
Detailed values for the lamp cooling and the vol-
ume flow which needs to be extracted for differ-
ent lamps can be found in the table "Setting
values for lamp cooling and lamp house extrac
-
tion" in section 2.1. "Prerequisites for Installa-
tion".
The basic components of the cooling are:
• Blowing of nitrogen onto the metallic lamp cap
(but never the glass tube),
• Blowing of compressed air into a heat sink (for ra-
diation of heat) in the lamp house.
The lamp-specific values both for the adjustment of
the blowing of nitrogen onto the upper and lower
lamp caps and also for the extraction should be ob
-
served.
Significant deviations from the setting values endan-
ger your safety!
Minor deviations affect the operating safety of the
lamp and machine.
If a lamp frequently illuminates in an unstable man-
ner, or of the life of the lamp has systematically de-
teriorated, carefully check the settings for the lamp
cooling. Frequently, the cause of such problems lies
in incorrect setting of these data or in incorrect fixing
of the connections. If you are not sure, call in SUSS
MicroTec's service to carry out a check!
Note!
In addition, in order to achieve good exposure
results, the evenness of the light should be ad
-
justed after fitting a new lamp.
1.6.1.4. Lamp Housing Extraction
As a rule, no suction is required for 200W and 350W
lamps.
Ozone extraction from the lamp housing must be en-
sured for the 500W DUV Hg/Xe lamp in the 350W
lamp housing to avoid health risk. Add-on kit
item no.
189553 is required for this purpose.
Detailed values can be found in the table "Set-
ting values for lamp cooling and lamp house ex-
traction" in section 2.1. "Prerequisites for
Installation".
1.6.1.5. Disposal
Used lamps should also only be stored and trans-
ported in the original protective packaging!
UV high-pressure lamps contain up to 1g of highly-
toxic mercury.
These lamps should therefore be treated as special-
category waste.
Local regulations on disposal should be observed.
It is possible to return the lamps to the supplier or
manufacturer.
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