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Rules for reading the manual, control names, warnings, and number references.
Meaning of LED states (on, off, flashing) for keyboard keys.
Definition of X, Y, and Z coordinate system units and origin.
Overview of optical system components like lamp, mirrors, lenses, and available lamp houses.
Description of knobs for X, Y, and Theta movement of the alignment stage.
Detailed list and explanation of front panel controls, gauges, and the LCD display.
Description and function of various keys on the machine's keyboard, including arrow keys and function keys.
Controls for the Top Side Alignment microscope, including movement and focus knobs.
Controls for the Dual Video Microscope, focusing on illumination and objective adjustments.
Controls for adjusting illumination intensity on the lamp house.
Operation of joysticks and buttons for stage and microscope control.
Step-by-step instructions for powering on the machine and igniting the exposure lamp.
Procedure for the initial mask print, including parameter adjustment and loading.
Steps for loading a mask into the machine, including handling and securing.
Procedure for loading a wafer onto the chuck and initiating WEC.
Steps for aligning the wafer to the mask using the TSA microscope.
Procedure for aligning the wafer using the BSA microscope.
Steps for aligning small substrates using a single BSA microscope.
Process of performing the exposure after alignment.
Steps for safely removing the mask from the machine.
Explanation of different exposure program types: proximity, soft, hard, and vacuum contact.
Procedure for performing multiple exposures with intervals.
Process to ensure wafer parallelism with the mask for uniform exposure.
Alternative method for loading masks using a transport slide.
Guide for selecting manual or slide mask loading via keystrokes.
Keystroke sequence for selecting and confirming an exposure program.
Steps for editing exposure time, alignment gap, and WEC type parameters.
Instructions for adjusting alignment speeds for different stages.
Procedure for saving, loading, or deleting custom program settings.
Detailed steps for changing the mask, including vacuum toggle.
Step-by-step guide for loading a wafer, including alignment and WEC.
Guide for loading masks using the slide method with BSA alignment.
Overview of general maintenance requirements and procedures for calibration.
Guidelines for routine maintenance tasks like cleaning, lamp service, and checks.
Procedures for measuring and calibrating exposure light intensity and uniformity.
Detailed steps for replacing the 1000W exposure lamp, including adjustments.
Procedure for replacing the halogen lamp used for microscope illumination.
Methods and materials for cleaning optical components safely and effectively.
Information on consumables, hazardous materials, and service requirements.
Table of parameter values for exposure and bonding processes, including ranges and defaults.
Alphabetical list of abbreviations used in the manual with their meanings.
List of part numbers and descriptions for the MA6/BA6 aligner.
Checklist for safety procedures when working on electrical circuits or equipment.
Diagrams illustrating the pneumatic system, presented in multiple sheets.
Diagram of the pneumatic system, sheet 1 of 8.
Diagram of the pneumatic system, sheet 2 of 8.
Diagram of the pneumatic system, sheet 3 of 8.
Diagram of the pneumatic system, sheet 4 of 8.
Diagram of the pneumatic system, sheet 5 of 8.
Diagram of the pneumatic system, sheet 6 of 8.
Diagram of the pneumatic system, sheet 7 of 8.
Diagram of the pneumatic system, sheet 8 of 8.
Diagrams illustrating the electronic system components and connections.
Schematics for mains connection, electronic rack, and power-related modules.
Schematics for keyboard, front panel, PCBs, microcontrollers, and interface cards.
Schematics for alignment stage, TSA/BSA microscopes, and related components.
Schematics for various cables connecting system components.
Reference to chemical safety cards for hazardous materials.
Information regarding subassemblies and component overviews for service.
List of subassemblies and their corresponding prefix numbers for service.
Component overview including valves, throttles, sensors, motors, regulators, gauges, and switches.
List of valves with medium and function.
List of throttles with medium and function.
List of sensors with their function and associated board/pin.
List of motors with their respective axis and function.
List of pressure regulators with their part numbers and functions.
List of gauges with their function.
List of vacuum/pressure sensors with medium and function.
Function of the flow meter for lower lamp socket cooling.
List of potentiometers and their functions for substrate and illumination adjustment.
List of switches and their functions, including main, emergency, and split field.
Mapping of PC boards to manual and motorized alignment stages.
General| Brand | SUSS |
|---|---|
| Model | MA6 |
| Category | Laboratory Equipment |
| Language | English |
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