SUSS MA6 - Load Wafer

Operation of the Machine
MA6 / MA8 - 1. Operation of the Machine - Rev.05 07-06
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1.5.7 Load Wafer
Display message Following operator action (keystroke)
"ready for Load" LOAD
"pull slide and load sub-
strate onto chuck"
• place wafer against the prealignment
pins on the chuck
• confirm with ENTER
• vacuum on transport slide goes on
"move slide into machine
and confirm with ENTER"
ENTER
"performing WEC - please wait..."
"microscope moving - please wait..."
(if BSA MICROSCOPE key is off)
"Align substrate"
• setup microscope (see chap. 3.3.3,
par. 4)
• align wafer
• optional check the alignment using
ALIGN CONT/EXP key (304) or ALIGN-
MENT CHECK key (305)
•press EXPOSURE
"z-axis moving -
please wait..."
(wafer moves to exposure position)
"Microscope moving -
please wait..."
(exposure takes place)
"please wait..."
(wafer moves down)
"Microscope moving - please wait..."
"pull slide and unload
exposed substrate"
do it
"ready for Load"