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SUSS MA6 - 3.6 Schematics of the Electronic System MA6;8 BA6;8; Main Connections and Power Schematics; Control and Interface Boards; Stage and Microscope Schematics

SUSS MA6
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Appendix
MA6-8 / BA6-8 - 4 Appendix - Rev.05 07-06
82
3
3.6 Schematics of the Electronic System MA6/8 BA6/8
Item Description Assembly # Schematic Page
1 Mains connection 108278 103501 3 pages
2 N2-loss/interlock module 114170 103506
3 Microscope illumination 114162 103400
4 Cable microscope illumination, lamp house 113369 102451
5 Front panel 114156 103505
6 Keyboard 114145 103490
7b Junction board, standard 114142 182459
7c Junction board, with NFH, mot. stage, sep.
knife
173828 173829
8 Auxilliary PCB 168638 168697
9a Backplane, standard 114143 103488
9b Backplane, mot. stage/ separation knife 168687 168688 2 pages
10 Electronic rack 108277 103500
11 Extension cable junction board-cards 149754 182253
12 Microcontroller, 8 bit 174850 174851
13 Output card 113775 103207
14 Input card 113764 103225
15a Motor driver card, 2 channel 113824 103236
15b Motor driver card, 4 channel 166225 167593
16 Alignment stage 114197 103508
17 Pneumatic 108347 182458
18 TSA microscope manipulator 114171 103485
19 BSA stage 114173 103388
20 Exposure unit 114169 103394
21 Microscope M204/234+AL300, focus left 111835 103571
22 Microscope M204/234+AL300, focus right 111836 103571
23 Cable TSA focus left/right, AL300 114054 103373
24 Microscope BSA right 159309 162968
25 Microscope BSA left 159308 162969
26 Cable BSA focus left/right, AL300 114053 103468
27 Extension cable BSA focus left/right 160209 160707
28 Extension cable BSA magn. choice left/right 160210 160708
29 Cable focus controller - microscope 181729 181743
30 Cable adaption frame grapper 181719 182456
31 Cable data exchange - EISS 181725 181741

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