M A I N T E NAN C E
OP MA6-8/BA6-8 E Rev05 07-06 Maintenance 39
2
2. MAINTENANCE
2.1. General
This chapter will acquaint you with the general main-
tenance requirements and will outline the proce-
dures for periodic maintenance and calibration such
as lamp replacements, intensity and uniformity
checks, power supply calibration and gap checks.
2.1.1. General Maintenance
The short time which you spend performing the fol-
lowing checks and tests will greatly improve the
overall performance of the mask aligner. Further
-
more be alert at all times to any unusual machine
noises, behavior, or changes in operation or results
which may be symptomatic of problems which could
damage the machine if left uncorrected.
2.1.2. Visual Checks
It is most important to conduct a thorough visual
check of the machine. Key areas include chuck and
maskholder. These parts should be free of dust and
residues, especially photoresist and pieces of bro
-
ken substrates. Also inspect for scratches and other
signs of wear since the use of scratched or damaged
chucks and mask holders will result in poor equip
-
ment performance.
Inflateable vacuum seals on chucks are especially
susceptible to damage by broken pieces.
Caution!
To remove substrate pieces from the
machine use always gloves AND twee-
zers to avoid skin contact.
2.1.3. Test Run
Run the equipment through a standard operating
program. All major subassemblies should function
properly i.e.
• Manipulators
• Alignment stage movement
• Mirror house movement
• Microscopes
2.1.4. Safety System Check
Inspect the machine for changes, which could be
harmful. Watch for evidence of degradation or unin
-
tended modifications.
At regular intervals (at least monthly) check the in-
terlock systems. Activate the EMO to unpower the
machine, lamp and CIC.
With lamp OFF ubt CIC in satand -by, test:
• lamp house door interlock
• lamp socket cooling interlock by switching off
N2 supply or by reducing cooling flow.
2.2. Preventive Maintenance
for MA6/ MA8
Warning!
Always set the machine to a safe status
before starting maintenance or service
tasks.
If there is any doubt about safety re-
quirements, completely de-energize the
machine.
Read and understand the warnings in
the safety chapter of this manual.
2.2.1. Cleaning
The following situations require specific cleaning of
the machine:
• Contaminated optical parts:
(see the specific chapter for cleaning of optics
below)
• Any contamination at process surfaces or at vac-
uum grooves or seals:
remove contaminants immediately by gently ap-
plying an IPA soaked lintfree tissue or a vacuum
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