MAINTENANCE
40
OP MA6-8/BA6-8 E Rev05 07-06 Maintenance
2
cleaner.
• Machine contaminated by broken fragments of
wafers or substrates:
remove such fragments directly before they
could enter to delicate moving subassemblies
(e.g.wedge error compensation head WEC) or
before they could damage vacuum seals or pro
-
cess surfaces. During removal wear safety gog-
gles and gloves and preferably use tweezers. If
tweezers access is not possible, use a syringe or
a vacuum cleaner; or blow it away using CDA -
which method may be more adequate to avoid
damage.
• Machine contaminated photo resist:
remove resist contaminations immediately with
IPA soaked tissue before they harden and may
require aggressive solvents for removal, which
could damage the machine surface.
Observe the warnings in the safety chapter when
working with solvents!
2.2.2. Lamp Service
With every lamp exchange check the quality of elec-
trical connections and of the cooling.
• Check that all electric connections in the lamp
house are metallic clean, replace any darkened
electric part!
• Check that the lamp sockets are still not dark-
ened after use, otherwise check and readjust
lamp cooling according to the respective values
listed in the lamp cooling section; check that
socket cooling nozzles are correctly directed to
the metallic lamp sockets.
2.2.3. Greasing
No regular lubrication is required. The rails of the
mirror house and of the chuck slider can be greased
annually very thin with NBU15.
2.2.4. WEC-Check
If a Heidenhain measurement set is available, paral-
lelity should be checked from time to time. Proce-
dure details are described int he manual of the
Heidenhain set.
2.2.5. Recommended SUSS
Service
To keep the machine in perfect running order it is
recommended that a SUSS service technician
should inspect the system completely every 2 or 3
years. If the machine is used for full time production
(i.e. 3 shifts), the inspection is recommended every
6 months. This inspection will include a full test of
WEC-functionality and re-adjustment of WEC-sys
-
tem.
2.3. Measuring the Intensity/
Uniformity of the Expo
-
sure Light
In order to ensure that exposures will be satisfactory
for uniform production results, it is important that the
values of the light intensity are within well defined
limits. With the optical probe, measure the light in
-
tensity at different points of the substrate. For this
purpose use the special measuring plate. Using the
high (H) and low (L) readings, determine that the uni
-
formity, as calculated by the formula:
Uniformity (%) =[(H-L) / (H+L)] x 100
is less than the specified value for your particular op-
tical system.
H [mW/cm²] = Intensity, highest value
L [mW/cm²] = Intensity, lowest value
Once the calculated value of the uniformity lies with-
in the given limits, calibrate the power supply as de-
scribed in the power supply manual.
2.3.1. Power Supply Calibration
To perform these adjustments, please refer to the
power supply manual (CIC).
2.3.1.1. Constant Intensity Controller
After a new exposure lamp has been installed and
adjusted for intensity and uniformity, the power sup
-
ply for the exposure lamp must be adjusted.
First it is necessary to adjust the power supply to the
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