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SUSS MA6 - 2.6 Cleaning of Optical Components

SUSS MA6
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M A I N T E NAN C E
OP MA6-8/BA6-8 E Rev05 07-06 Maintenance 47
2
2.6. Cleaning of Optical
Components
Whenever the resolution worsens significantly - re-
sulting on a blurred or obstructed image - or if light
intensity decreases, or if visible contamination is to
be seen on the optical components - including a
translucent film on mirrors, the optical surfaces
should be cleaned.
Deposition on optical surfaces can happen and may
be caused by impurity of gaseous media or by pro
-
cess solvents or other process related contamina-
tion. Depending on the type of deposition it could be
blown off dry or washed off by an appropriate solu
-
tion.
Be very gentle in cleaning because most optical
parts (mirrors, lenses) have high grade coating.
Caution!
High grade optical surfaces are a deter-
mining factor for image quality.
When cleaning any optical surface, the
surface quality could be damaged
heavily if improper method or material
is used.
Do not touch optical surfaces with
rough material or with bare skin!
Use only solvents and methods as rec-
ommended below. NEVER use aggres-
sive solvents like acetone.
Never soak optical components in sol-
vents for an extended time. Adhesive
compounds could be dissolved and
coatings could be destroyed.
Warning!
Isopropyl alcohol (IPA), Petroleum
Ether and many other solvents are
highly flammable.
Use of such solvents is only allowed in
a well-ventilated area, with ignition
sources removed.
Moreover, also cloth soaked with flam-
mable solvent has a potential for self-
ignition.
Deposit used soaked tissues according
to local safety regulations.
Use of flammable solvents is restricted
to adequately trained personnel.
Warnings of the MSDS (Material Safety
Data Sheet) must be understand and re
-
spected.

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