SUSS MA6 - Alignment of Lamp in Ellipsoid Mirror

M A I N T E NAN C E
OP MA6-8/BA6-8 E Rev05 07-06 Maintenance 41
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measurement obtained on the power meter with the
optical probe placed in the center of the exposure
field. Then the power supply is adjusted to the de
-
sired intensity output. After adjustment, the reading
on the power meter should track the reading on the
power supply.
Also reset the lamp life counter.
2.3.1.2. Constant Power Controller
The input power of the lamp should not exceed the
manufacturer’s specification.
• Find the corresponding instructions in the data
sheet packed with each lamp.
To perform these adjustments, refer to the power
supply manual.
2.3.2. Alignment of Lamp in
Ellipsoid Mirror
According to a cartesian coordinate system X, Y, Z
the exposure lamp is brought into the correct posi
-
tion by actuating the manipulator control knobs Y, Z
and X correspondingly. The manipulator controls
are located on the front side of the lamp house. Op
-
tionally the manipulators may be connected by spin-
dles to knobs on front of the machine.