SUSS MA6 - Page 50

MAINTENANCE
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OP MA6-8/BA6-8 E Rev05 07-06 Maintenance
2
2.3.2.1. Interior of the Lamp House
LH1000
1 Microscope illumination, fiber optics
2 Ellipsoidal mirror
3 Nitrogen supply tubing
4 Shutter (not visible)
5 Connecting cable, cathode (-) of exposure lamp
6 Connecting cable, anode (+) of exposure lamp
7 Cold light mirror
8 Adjustment knobs for position of exposure lamp
(X,Y,Z)
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1
2
3
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