SUSS MA6 - TSA-Microscope Controls

Operation of the Machine
MA6 / MA8 - 1. Operation of the Machine - Rev.05 07-06
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1.2.4 TSA-Microscope Controls
TSA-Microscope M 336
401 BEAM SPLITTER TSA
402 TSA Z-MOVEMENT knob
403 TSA Θ-MOVEMENT knob
404 OBJECTIVE FOCUS FINE MANUAL knob
405 OBJECTIVE X-SEPARATION knobs
406 CLAMPING SCREW
407 APERTURE TSA-Illumination
408 TSA SPLITFIELD switch
409 Turret