OPERATION OF THE MACHINE
MA6 / MA8 - 1. Operation of the Machine - Rev.05 07-06
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313 ENTER key
Press the ENTER key to confirm an action whenever
the program prompts you to do so.
314 SET REFERENCE key
The SET REFERENCE key enables the operator to
store the actual microscope position of the TSA or
BSA microscope as reference position. This is neces
-
sary for the SCAN key function. This can be used also
for the alignment stage.
315 SCAN key
This key can be used only after a reference position
for the selected microscope with the SET REFER
-
ENCE key is stored (i.e. the position for the first align-
ment mark). Then the microscope can be moved to a
new position (i.e. the position for the second align
-
ment mark). Activating the SCAN key toggle the po-
sition of the microscope between the current position
and the reference position. This can be used also for
the alignment stage.
316 EXPOSURE key
This key starts the active exposure program after an
alignment or in first mask print mode.
317 Multiple Exposure key
It is possible to split the exposure in several intervals.
The key must be activated for this (LED on). See also
chapter 3.4.2.
318 LAMP TEST key
Pressing this key moves the mirror house forward
and open the light shutter. Exposure intensity and
uniformity adjustment is possible. Deactivating this
key finish this task.
319 PRE-BOND key
Enabled only in the bond-aligner-mode: this moves
the wafers together and the vacuum sequence starts.
320 PERFORM CLAMPING key
Enabled only in the bond-aligner-mode: this clamps
the wafers together with or without spacers.
321 OPTION key
The X-ARROW keys controls the Θ-movement for the
motorized alignment stage when OPTION key is acti
-
vated.
322 BSA MICROSCOPE key
Toggles the motor control and image processing be-
tween TSA (LED off) and BSA (LED on) microscopes.
323 LEFT key
For BSA alignment only the movement of the left ob-
jective is possible.
324 BOTH key
The simultaneous movement of both BSA-objectives
is possible.
325 RIGHT key
For BSA alignment only the movement of the right
objective is possible.
326 TOP/BOTTOM key
Toggle the focus plane between mask plane (LED on)
and wafer plane.
327 GRAB IMAGE key
By activating this key the current monitor image is
stored as background image to be superimposed
with the wafer image later on.
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